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Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve VAT Vakuumventile AG . 612. Butterfly valve control system for pressure control, integrated controller .. Manual emergency operation on solenoid lockable.21 Jun 2011 Series 612 DN 50 (I.D. 2”), RS485. VAT configured with firmware 612P.1E.65 Connect VAT heating device according to manual of. VAT VACUUM ANGLE VALVE, ANGLE KF 25 MM: Vacuum Angle Valve Series 612. 124389. VAT VAT MANUAL VACUUM VALVE ISO-F 100 MM: Manual VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel +41 81 771 61 61 Fax +41 81 771 48 30 www.vatvalve.com. Butterfly valve control system. Series 61 Series Number, 612. Series Name, Butterfly valve control system. Description, Butterfly pressure control valves for downstream applications. Very fast and strong VAT valve applications include: Semiconductor manufacturing, Synchrotrons, Thin Film Downloads. Manual PDF [Download] 3.96 MB; Product Datasheet PDF VAT Vakuumventile AG, CH-9469 Haag, Switzerland Tel ++41 81 771 61 61 Fax ++41 81 771 48 30 . to combine a series 612 valve with a series 121 isolation VAT valve applications include: Semiconductor manufacturing, Synchrotrons, Thin Film Downloads. Manual PDF [Download] 3.43 MB; Product Datasheet PDF 19 Feb 2013 VAT Vakuumventile AG, CH-9469 Haag, Switzerland. Tel +41 81 771 This manual is valid for the valve ordering number(s):. 612 . . - . . GP - .